Associate Professor Steve Shu

• Associate Professor

• Academic Profile

Biography

Specializing in metrology, lithography and ultra-precision measurement and motion control.

A/Prof. Steve Shu is an Associate Professor at the School of Electrical and Computer Engineering at The University of Sydney. He received his B. Eng degree from Shanghai Jiaotong University in 2002, M.Eng from Nanyang Technological University in 2004, and Ph.D from The University of Melbourne in 2007, all in electrical and electronic engineering. Before returning to academia, he had worked for more than a decade in the microelectronics industry (e.g., at the microelectronics research institute IMEC, the world’s leading semiconductor equipment supplier ASML in the Netherlands).